The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Mar. 15, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Alvaro Garcia, Mountain View, CA (US);
Tony Jefferson Gnanaprakasa, Mountain View, CA (US);
Sankaranarayanan Ravi, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and controller for processing substrates are described herein. In one example, a method of processing a substrate on a substrate support disposed on a cooling base comprises obtaining a temperature value at a bottom of the substrate support, obtaining a temperature value associated with the cooling base, determining a substrate temperature, and processing the substrate while disposed on the substrate support. The determined substrate temperature is based on, a thermal resistivity characteristic of the substrate support, the temperature value of the bottom of the substrate support, and the temperature value associated with the cooling base.
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