Alois Goller

Title: Alois Goller: Innovator in Wafer Processing Technology

Introduction

Alois Goller is a notable inventor based in Villach, Austria. He has made significant contributions to the field of wafer processing technology, holding a total of 4 patents. His work focuses on developing advanced apparatuses and methods for processing wafer-shaped articles, which are crucial in various technological applications.

Latest Patents

Goller’s latest patents include an "Apparatus for processing a wafer, and method of controlling such an apparatus." This invention features a rotatable chuck designed to receive a wafer, along with a heating assembly that utilizes an array of light-emitting heating elements to heat the wafer effectively. Additionally, it incorporates light sensors to detect the emitted light from the heating elements. Another significant patent is the "Method and apparatus for processing wafer-shaped articles," which describes a rotary chuck and a heating assembly that faces the wafer-shaped article. This apparatus also includes a liquid dispenser that can dispense liquid onto the surface of the wafer, enhancing the processing capabilities.

Career Highlights

Alois Goller is currently employed at Lam Research AG, a company renowned for its innovative solutions in semiconductor manufacturing. His work at Lam Research AG has allowed him to push the boundaries of wafer processing technology, contributing to advancements that benefit the industry.

Collaborations

Goller has collaborated with notable colleagues such as David S. Mui and Butch Berney. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in wafer processing.

Conclusion

Alois Goller stands out as a key figure in the field of wafer processing technology. His patents and contributions reflect his commitment to innovation and excellence in this specialized area. His work continues to influence the industry and pave the way for future advancements.