The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Jan. 03, 2020
Applicant:
Lam Research Ag, Villach, AT;
Inventors:
Daniel Brien, Villach, AT;
Pradeep Thirugnanam, Villach, AT;
Matija Ponikvar, Villach, AT;
Alois Goller, Villach, AT;
Assignee:
LAM RESEARCH AG, Villach, AT;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); H01L 21/68764 (2013.01);
Abstract
An apparatus for processing a wafer comprises: a rotatable chuck adapted to receive a wafer; a heating assembly comprising an array of light-emitting heating elements arranged to illuminate a wafer received by the rotatable chuck to heat the wafer; and one or more light sensors arranged to detect light emitted by the array of light-emitting heating elements.
Brien, Daniel. (2025). Apparatus for processing a wafer, and method of controlling such an apparatus (U.S. Patent No. 12217980). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12217980
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile