The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Nov. 27, 2012
Lam Research Ag, Villach, AT;
Michael Schwaiger, Drobollach, AT;
Alois Goller, Villach, AT;
Christopher Miggitsch, Riegersdorf, AT;
LAM RESEARCH AG, Villach, AT;
Abstract
A flow control system in an apparatus for treating a work piece controls a flow rate of treatment liquid dispensed from a liquid dispenser. The system includes a flow meter that measures a flow rate of liquid being supplied to the liquid dispenser, a controller that receives signals indicative of a flow rate measured by the flow meter, and a pressure regulator that regulates pressure of the liquid supply downstream of the flow meter based on control signals from the controller. At least two alternative liquid supply paths are provided downstream of the pressure regulator and upstream of an outlet of the liquid dispenser. Each supply path is equipped with a respective shutoff valve and provides a respectively different pressure drop to the treatment liquid.