Location History:
- Fort Worth, TX (US) (2005)
- Forth Worth, TX (US) (2005 - 2006)
Company Filing History:
Years Active: 2005-2006
Title: The Innovative Contributions of Allan Wendell Awtrey
Introduction
Allan Wendell Awtrey is a notable inventor based in Fort Worth, Texas, recognized for his significant contributions to the field of polymeric film development and contaminant removal technologies. With a total of four patents to his name, Awtrey has made strides in utilizing supercritical fluids for innovative applications.
Latest Patents
Awtrey's latest patents include groundbreaking technologies that enhance the development of polymeric films. One of his patents focuses on developing photoresist with supercritical fluid and developer. This invention discloses an apparatus for developing a polymeric film without the need for a water rinse step. The process involves placing an object with a polymeric film onto a support region within a pressure chamber, where a fluid and developer are introduced under supercritical conditions. This method ensures that the polymeric film remains substantially undeformed during processing.
Another significant patent addresses the process and apparatus for removing contaminants from a substrate using supercritical fluids. This innovative approach takes advantage of the higher solubility of contaminants in their supercritical state compared to their liquid state. The substrate is exposed to a supercritical fluid in a chamber, allowing for effective contaminant removal. Outside the chamber, the supercritical fluid is cooled to its liquid state, facilitating the separation of contaminants from the liquid phase. This method is particularly beneficial for substrates that can only tolerate limited physical or mechanical stress.
Career Highlights
Allan Wendell Awtrey is currently employed at Tokyo Electron Limited, where he continues to develop and refine his innovative technologies. His work has positioned him as a key figure in the advancement of materials science and engineering.
Collaborations
Awtrey has collaborated with notable colleagues, including Nicholas Alan Ryza and Chantal J Arena-Foster, contributing to a dynamic and innovative work environment.
Conclusion
Allan Wendell Awtrey's contributions to the field of polymeric film development and contaminant removal through supercritical fluid technologies highlight his role as a leading inventor. His patents reflect a commitment to innovation and the advancement of engineering practices.