The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Feb. 14, 2003
Chantal J. Arena-foster, Mesa, AZ (US);
Allan Wendell Awtrey, Fort Worth, TX (US);
Nicholas Alan Ryza, Austin, TX (US);
Paul Schilling, Granite Bay, CA (US);
Chantal J. Arena-Foster, Mesa, AZ (US);
Allan Wendell Awtrey, Fort Worth, TX (US);
Nicholas Alan Ryza, Austin, TX (US);
Paul Schilling, Granite Bay, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method for drying an object, having a polymeric film, wherein the object is submerged in a rinse liquid. The object is removed from the rinse liquid and the object is placed in a solvent bath before a sufficient amount of the rinse liquid can evaporate from the object. The density of a solvent in the solvent bath depends on a direction of orientation of the polymeric film with respect to a force. The object is removed from the solvent bath. A drying process is performed.