Company Filing History:
4 out of 641 
4 out of 1,787 
Years Active: 2008-2017
Title: Alexander Slobodov: Innovator in Substrate Inspection Systems
Introduction
Alexander Slobodov is a prominent inventor based in San Jose, CA (US). He holds a total of 8 patents that showcase his expertise in the field of substrate inspection systems. His innovative contributions have significantly advanced the technology used in this area.
Latest Patents
Among his latest patents is a method and system for simultaneous tilt and height control of a substrate surface in an inspection system. This system includes a dynamically actuatable substrate stage assembly, which secures a substrate, and a tilt-height detection system comprising both height and tilt detection subsystems. The system is equipped with actuators that allow for precise control of the substrate's position. Another notable patent is a scanning inspection system with angular correction. This system addresses angular errors that occur when a wafer is moved under an inspection spot, ensuring accurate representation of the inspection spot's position relative to the wafer.
Career Highlights
Throughout his career, Alexander Slobodov has worked with notable companies such as KLA-Tencor Technologies Corporation and KLA-Tencor Corporation. His experience in these organizations has contributed to his development as an inventor and innovator in the field.
Collaborations
Some of his coworkers include Anatoly Romanovsky and Christian Wolters, who have collaborated with him on various projects.
Conclusion
Alexander Slobodov's contributions to substrate inspection systems through his patents and career experiences highlight his role as a significant innovator in the field. His work continues to influence advancements in technology related to substrate inspection.