Akio Shibata

Title: Akio Shibata: Innovator in Beam Source Technology

Introduction

Akio Shibata is a notable inventor based in Fujisawa, Japan. He has made significant contributions to the field of beam source technology, holding a total of 4 patents. His work focuses on the development of advanced beam processing apparatuses that have applications in various industries.

Latest Patents

Shibata's latest patents include innovative designs for beam sources. One of his patents describes a beam source that features a plasma generating chamber, an antenna for generating plasma, and two electrodes. This design allows for the extraction of particles from the plasma, enabling the application of various types of beams, such as positive ion beams, negative ion beams, and neutral particle beams, uniformly to a workpiece. Another patent outlines a beam source that incorporates a gas inlet port for introducing gas into the plasma chamber. This design includes a plasma generator that produces positive-negative ion plasma, along with a grid electrode that has multiple beam extraction holes.

Career Highlights

Throughout his career, Akio Shibata has worked with prominent organizations, including Ebara Corporation and Tohoku University. His experience in these institutions has contributed to his expertise in beam technology and innovation.

Collaborations

Shibata has collaborated with notable colleagues, including Katsunori Ichiki and Akira Fukuda. These partnerships have further enhanced his research and development efforts in the field.

Conclusion

Akio Shibata is a distinguished inventor whose work in beam source technology has led to significant advancements in the field. His innovative patents and collaborations reflect his commitment to pushing the boundaries of technology.