Akimichi Yonekura

Title: Akimichi Yonekura: Innovator in Semiconductor Processing

Introduction

Akimichi Yonekura is a notable inventor based in Kawasaki, Japan, recognized for his contributions to semiconductor technology. He holds two patents that showcase his innovative approach to improving semiconductor wafer processing.

Latest Patents

Yonekura's latest patents include a vertical boat used for heat treatment of semiconductor wafers. This invention features a semiconductor wafer boat designed for a vertical CVD apparatus, which includes four columns fixed to upper and lower support plates. Each column has multiple first grooves arranged at regular intervals to place wafers in a substantially parallel orientation. Additionally, second grooves are formed alternately with the first grooves, and a plate ring is provided for each second groove to enhance the uniformity of film thickness on each wafer. Each ring has an outer diameter larger than that of a wafer and an inner diameter smaller than that of the wafer, allowing for clearance to transfer each wafer vertically. His second patent focuses on a method of processing substrates and a substrate processing apparatus that ensures uniform processing conditions in a CVD apparatus, epitaxial apparatus, or etching apparatus by adjusting positions in the gas flow direction over time.

Career Highlights

Throughout his career, Yonekura has worked with prominent companies such as Kabushiki Kaisha Toshiba and Tokyo Electron Limited. His experience in these organizations has significantly contributed to his expertise in semiconductor technology and innovation.

Collaborations

Yonekura has collaborated with notable colleagues, including Yuuichi Mikata and Reiji Niino, further enhancing his work in the field of semiconductor processing.

Conclusion

Akimichi Yonekura's innovative patents and career in semiconductor technology highlight his significant contributions to the industry. His work continues to influence advancements in semiconductor processing techniques.