Miyagi, Japan

Akihiro Tsuji

USPTO Granted Patents = 11 

Average Co-Inventor Count = 1.8

ph-index = 2

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2016-2025

where 'Filed Patents' based on already Granted Patents

11 patents (USPTO):

Title: The Innovative Contributions of Akihiro Tsuji

Introduction

Akihiro Tsuji is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of etching technology, holding a total of 11 patents. His work focuses on developing advanced apparatuses and methods that enhance the precision and efficiency of etching processes.

Latest Patents

Among his latest patents is an etching apparatus designed to selectively etch a first region with respect to a second region made of a different material. This apparatus utilizes a plasma of a treatment gas, which includes a fluorocarbon gas, an oxygen-containing gas, and an inert gas. The process involves generating a deposit of fluorocarbon on the workpiece and etching the first region with radicals from this deposit. Another notable patent is an etching method that includes forming an etching assistance layer on silicon-containing regions and imparting energy to this layer to facilitate the etching process. Both patents demonstrate Tsuji's innovative approach to improving etching techniques.

Career Highlights

Akihiro Tsuji has built a successful career at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His expertise in etching technology has positioned him as a key figure in the development of advanced manufacturing processes. His contributions have not only advanced the technology but have also had a significant impact on the industry.

Collaborations

Tsuji has collaborated with notable colleagues, including Hikaru Watanabe and Masanobu Honda. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Akihiro Tsuji's work in etching technology exemplifies the spirit of innovation. His patents and contributions to Tokyo Electron Limited highlight his role as a leading inventor in the field. His advancements continue to influence the semiconductor industry and pave the way for future developments.

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