Akifumi Sano

Title: Akifumi Sano: Innovator in Semiconductor Technology

Introduction

Akifumi Sano is a prominent inventor based in Susono, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods and apparatuses that enhance the manufacturing processes of semiconductor devices.

Latest Patents

One of Akifumi Sano's latest patents is a method of manufacturing a semiconductor device. This method includes a groove portion formation process, a barrier layer formation process, a seed layer formation process, and a seed layer melting process. The seed layer is made of copper (Cu) and is melted using the reflow method. Another notable patent is for a sputtering apparatus designed to perform self-sputtering stably by accelerating the ionization of atoms scattered from a target. This apparatus features a target within a vacuum chamber, a magnet assembly to form a magnetic field, and a DC power supply to charge the target with a negative DC potential.

Career Highlights

Akifumi Sano is currently employed at Ulvac, Inc., where he continues to develop innovative technologies in semiconductor manufacturing. His expertise and inventions have positioned him as a key figure in the industry.

Collaborations

Throughout his career, Akifumi has collaborated with notable coworkers, including Junichi Hamaguchi and Shuji Kodaira. These collaborations have further enriched his work and contributed to advancements in semiconductor technology.

Conclusion

Akifumi Sano's contributions to semiconductor technology through his patents and career at Ulvac, Inc. highlight his role as an influential inventor in the field. His innovative methods and apparatuses continue to shape the future of semiconductor manufacturing.