Company Filing History:
Years Active: 2023-2025
Title: Akhil Singhal: Innovator in Semiconductor Processing
Introduction
Akhil Singhal is a prominent inventor based in Portland, OR (US), known for his contributions to semiconductor processing technologies. With a total of 5 patents, he has made significant advancements in the field, particularly in the development of systems and methods that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of his latest patents focuses on "Systems and methods of seasoning electrostatic chucks with dielectric seasoning films." This innovation describes semiconductor processing systems that involve flowing deposition precursors into a substrate processing region of a semiconductor processing chamber. The process includes depositing a seasoning layer on the electrostatic chuck, characterized by a dielectric constant greater than or about 3.5. Additionally, the methods involve applying a voltage to the seasoned electrostatic chuck of greater than or about 500 V, ensuring that the leakage current remains below or about 25 mA when the voltage is applied.
Another notable patent is related to "Helium-free silicon formation." This exemplary deposition method includes delivering a silicon-containing precursor and an inert gas to a processing region of a semiconductor processing chamber. The method also incorporates a hydrogen-containing precursor, forming a plasma of all precursors within the processing region. This innovative approach allows for the deposition of silicon-containing material on a substrate while maintaining the processing region free of helium delivery.
Career Highlights
Akhil Singhal is currently employed at Applied Materials, Inc., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in developing new methods that improve the performance and reliability of semiconductor devices.
Collaborations
He collaborates with talented coworkers, including Allison Yau and Zeqiong Zhao, contributing to a dynamic and innovative work environment.
Conclusion
Akhil Singhal's contributions to semiconductor processing through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the industry. His advancements are paving the way for more efficient semiconductor manufacturing processes.
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