Company Filing History:
Years Active: 2025
Title: **Innovator Spotlight: Aixi Zhang**
Introduction
Aixi Zhang, a prominent inventor based in Sunnyvale, California, has made significant contributions to the field of semiconductor technology. With a portfolio that includes five patents, Zhang's innovative work focuses on enhancing processes in the manufacturing of semiconductor devices.
Latest Patents
Among Zhang's latest patents are two notable inventions:
1. **Self field-suppression CVD tungsten (W) fill on PVD W liner** - This patent details methods and associated apparatus for effectively filling features in a substrate. The process includes depositing a seed layer of tungsten using a physical vapor deposition (PVD) method, followed by a bulk layer deposition through a chemical vapor deposition (CVD) method. The design ensures that the CVD process is selective to the features of the substrate, thereby enhancing efficiency.
2. **Metal oxide preclean for bottom-up gapfill in MEOL and BEOL** - This patent focuses on a pre-cleaning method for semiconductor structures. It involves a plasma pre-treatment to eliminate impurities, a selective etch process to remove molybdenum oxide, and a post-treatment process to clean up chlorine residues. This innovation is crucial for maintaining the integrity of metal and dielectric layers in semiconductor manufacturing.
Career Highlights
Aixi Zhang is currently employed at Applied Materials, Inc., a leading company specializing in equipment and services for the semiconductor and display industries. His role involves developing cutting-edge technologies that are essential for the advancement of semiconductor fabrication processes.
Collaborations
Throughout his career, Zhang has collaborated with talented individuals such as Rongjun Wang and Yi Xu. These partnerships have played a vital role in fostering innovative solutions and enhancing the overall research and development efforts within his field.
Conclusion
Aixi Zhang's contributions to semiconductor technology are invaluable, as evidenced by his patents and work at Applied Materials, Inc. His dedication to innovation continues to shape the landscape of semiconductor manufacturing, paving the way for future advancements in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.