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For the Inventor, By the Inventor

Campbell, CA, United States of America

Afshin Nickhou

This inventor holds 3 USPTO granted patents and 2 EPO patents. Top assignee: Lam Research Corporation. Active years: 2005-2007.

USPTO Granted Patents = 3


Average Co-Inventor Count = 4.3

ph-index = 3

Forward Citations = 49(Granted Patents)


Company Filing History:

goldMedal3 out of 3,932 
 
Lam Research Corporation
 patents

Years Active: 2005-2007

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3 patents (USPTO):Explore Patents
1. 7234477 - Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces (2007-06-26),
2. 6866051 - Megasonic substrate processing module (2005-03-15),
3. 6851436 - Substrate processing using a fluid re-circulation system in a wafer scrubbing system (2005-02-08),
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