The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2007
Filed:
Sep. 30, 2002
John M. DE Larios, Palo Alto, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Carl Woods, Aptos, CA (US);
Fritz Redeker, Fremont, CA (US);
James P. Garcia, Santa Clara, CA (US);
Afshin Nickhou, Campbell, CA (US);
John M. de Larios, Palo Alto, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Carl Woods, Aptos, CA (US);
Fritz Redeker, Fremont, CA (US);
James P. Garcia, Santa Clara, CA (US);
Afshin Nickhou, Campbell, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
One of many embodiments of a substrate preparation system is provided which includes a head having a head surface where the head surface is proximate to a surface of the substrate. The system also includes a first conduit for delivering a first fluid to the surface of the substrate through the head, and a second conduit for delivering a second fluid to the surface of the substrate through the head, where the second fluid is different than the first fluid. The system also includes a third conduit for removing each of the first fluid and the second fluid from the surface of the substrate where the first conduit, the second conduit and the third conduit act substantially simultaneously.