1 Patents
#5,742 in Tokyo
#15,557 in Japan
Tokyp Electron Limited
Forward Citations = 181
4 inventors:
4 inventors (with patents filed for the assignee):
Masaru Hori (1 out of 53 patents)
Junichi Kitagawa (1 out of 52 patents)
Yoshiro Kabe (1 out of 14 patents)
4. Toshihiko Shiozawa (1 out of 6 patents)
1 patent: