Forward Citations = 11

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3 inventors (with patents filed for the assignee):

Akinori Kitamura (1 out of 18 patents)

Hiroyuki Ishihara (1 out of 7 patents)

Kiichi Hama (1 out of 1 patent)

1 patent: Sort by Forward Citations

#908 in

#15,539 in Japan

Tokyo Electron at Limited and Japan Science and Technology Corporation

Forward Citations = 11

3 inventors:

Akinori Kitamura (1 out of 18 patents)

Hiroyuki Ishihara (1 out of 7 patents)

Kiichi Hama (1 out of 1 patent)

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