1 Patents
#913 in
#15,596 in Japan
Tokyo Electron at Limited and Japan Science and Technology Corporation
Forward Citations = 11
3 inventors:
3 inventors (with patents filed for the assignee):
Akinori Kitamura (1 out of 18 patents)
Hiroyuki Ishihara (1 out of 7 patents)
Kiichi Hama (1 out of 1 patent)
1 patent:
#913 in
#15,596 in Japan
3 inventors: