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Forward Citations = 336

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8 inventors (with patents filed for the assignee):

Michael R Biche (5 out of 5 patents)

H Alexander Anderson (3 out of 7 patents)

Roy E Hurtig (3 out of 7 patents)

4. William T Batchelder (3 out of 3 patents)

5. Michael L Parodi (3 out of 3 patents)

6. Alexander Lurye (2 out of 2 patents)

7. Michael B Biche (1 out of 1 patent)

8. Vuong P Nguyen (1 out of 1 patent)

11 patents: Sort by Forward Citations

1. 5935768 - Method of processing a substrate in a photolithography system utilizing (1999-08-10),

2. 5885661 - Droplet jet method for coating flat substrates with resist or similar (1999-03-23),

3. 5798140 - Oscillatory chuck method and apparatus for coating flat substrates (1998-08-25),

4. 5766824 - Method and apparatus for curing photoresist (1998-06-16),

5. 5651823 - Clustered photolithography system (1997-07-29),

6. 5553994 - Thermal process module for substrate coat/develop system (1996-09-10),

7. 5472502 - Apparatus and method for spin coating wafers and the like (1995-12-05),

8. 5443348 - Cassette input/output unit for semiconductor processing system (1995-08-22),

9. 5427820 - Thermal control line for delivering liquid to a point of use in a (1995-06-27),

10. 5392989 - Nozzle assembly for dispensing liquid (1995-02-28),

11. 5289222 - Drain arrangement for photoresist coating apparatus (1994-02-22),

Semiconductor Systems, Inc. is a leading provider of innovative semiconductor manufacturing equipment. With over 30 years of experience in the industry, we offer a wide range of advanced solutions for the production of semiconductors. Our cutting-edge technology and commitment to quality have established us as a trusted partner for semiconductor manufacturers worldwide.

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USPTO Data Jan 1 1976 - Sep 22 2026

11 Patents

#168 in Fremont, CA

#6,524 in California

#27,457 in US

#51,637 in the World

Fremont, CA, United States of America

Semiconductor Systems, Inc.