Company Filing History:
Years Active: 1995-1997
Title: Innovations by Alexander Lurye in Photolithography Systems
Introduction
Alexander Lurye is an accomplished inventor based in Fremont, California. He has made significant contributions to the field of semiconductor processing, particularly in photolithography systems. With a total of two patents to his name, Lurye's work has advanced the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
Lurye's latest patents include a clustered photolithography system and a cassette input/output unit for semiconductor processing systems. The clustered photolithography system features a substrate handling robot that pivots around a fixed point, allowing for the transfer of substrates between various components such as a photoresist coater, developer, and heating/cooling unit. This innovative design enables both vertical and lateral movement of the robot's end effector, facilitating the stacking of individual modules within the heating/cooling unit. Additionally, the system integrates a thermal process module that performs both baking and cooling of silicon substrates in a single unit, enhancing processing efficiency.
The cassette input/output unit is designed to handle cassettes containing semiconductor wafers or other substrates. This unit includes a drawer front that rotates 90 degrees as it opens, allowing for easy placement of cassettes with wafers oriented vertically. As the drawer closes, the cassette is rotated to a horizontal position for access by the robot within the photolithography system. A clamping mechanism ensures that the cassette is securely held in place during operation.
Career Highlights
Lurye is currently employed at Semiconductor Systems, Inc., where he continues to innovate in the semiconductor field. His work has been instrumental in developing advanced technologies that streamline semiconductor processing.
Collaborations
Lurye collaborates with notable colleagues, including Michael R. Biche and Michael L. Parodi, who contribute to the innovative environment at Semiconductor Systems, Inc.
Conclusion
Alexander Lurye's contributions to photolithography systems exemplify the impact of innovation in semiconductor processing. His patents reflect a commitment to enhancing manufacturing efficiency and effectiveness.