Company Filing History:
Years Active: 1995-1999
Title: Innovations by Michael R. Biche in Photolithography Systems
Introduction
Michael R. Biche is a notable inventor based in Union City, CA (US), recognized for his contributions to the field of photolithography systems. With a total of five patents to his name, Biche has made significant advancements in the processing of substrates, particularly in the semiconductor industry.
Latest Patents
Biche's latest patents include a method of processing a substrate in a photolithography system. This innovation involves an apparatus and method for baking and cooling silicon substrates within a single integrated thermal process module. The module features two hot plate assemblies, a cool plate assembly, and two local linear transfer arms, all controlled by a micro-processor based module controller. This design ensures efficient substrate handling without conflicts in the use of transfer arms or thermal assemblies. Additionally, Biche has developed a method and apparatus for curing photoresist, which includes a substrate handling robot that pivots to transfer substrates between various units, enhancing the efficiency of the photolithography process.
Career Highlights
Biche has dedicated his career to advancing semiconductor technologies through innovative solutions. His work at Semiconductor Systems, Inc. has positioned him as a key player in the development of cutting-edge photolithography systems. His patents reflect a deep understanding of the complexities involved in substrate processing and handling.
Collaborations
Throughout his career, Biche has collaborated with notable colleagues, including H Alexander Anderson and Michael L Parodi. These collaborations have contributed to the successful development and implementation of various technologies in the semiconductor field.
Conclusion
Michael R. Biche's contributions to photolithography systems exemplify the impact of innovation in the semiconductor industry. His patents and career achievements highlight his commitment to advancing technology and improving processes within the field.