Enter assignee name

Forward Citations = 107

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5 inventors (with patents filed for the assignee):

Daniel Babbs (5 out of 47 patents)

Richard E Shultz (4 out of 5 patents)

Jay S Sussman (1 out of 1 patent)

4. Richard E Schultz (1 out of 1 patent)

5. John Van Strien (1 out of 1 patent)

6 patents: Sort by Forward Citations

1. 6077026 - Programmable substrate support for a substrate positioning system (2000-06-20),

2. 5853214 - Aligner for a substrate carrier (1998-12-29),

3. 5834915 - Sustrate housing and docking system (1998-11-10),

4. 5823361 - Substrate support apparatus for a substrate housing (1998-10-20),

5. 5785186 - Substrate housing and docking system (1998-07-28),

6. 5664926 - Stage assembly for a substrate processing system (1997-09-09),

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This text is generated by artificial intelligence and may not be accurate.