Richard E Shultz is a notable inventor based in Austin, TX, with a focus on innovations in substrate support systems. He holds a total of five patents, showcasing his expertise and contributions to the field of semiconductor processing.

Latest Patents

One of his latest patents is for a programmable substrate support for a substrate positioning system. This invention includes a first substrate support that mates with a second substrate support, enabling automatic switching between different types of substrates. The first substrate support is designed to handle a specific type of substrate, while the second support accommodates another type, allowing for versatility in handling various substrate sizes, such as 200 mm and 300 mm wafers. Another significant patent is for a substrate housing and docking system, which provides a modular, transportable housing for storing substrates like semiconductor wafers. This system maintains a clean environment for the substrates and includes a docking unit that interfaces with a clean environment, allowing for efficient loading and unloading of substrates.

Career Highlights

Throughout his career, Richard has worked with Progressive System Technologies, Inc., where he contributed to advancements in substrate handling technologies. His work has significantly impacted the efficiency and effectiveness of semiconductor processing.

Collaborations

Richard has collaborated with notable individuals in the industry, including his coworker Jay S Sussman, enhancing the innovation process through teamwork and shared expertise.

Conclusion

Richard E Shultz is a distinguished inventor whose contributions to substrate support systems have advanced the semiconductor industry. His innovative patents reflect his commitment to improving technology and efficiency in substrate handling.

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