The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1997
Filed:
Jul. 11, 1995
Progressive System Technologies, Inc., Austin, TX (US);
Abstract
A stage assembly for a substrate processing system including a cassette support assembly for receiving and supporting a cassette and an actuation and support assembly for supporting and moving the cassette and cassette support assembly between a loading position and a processing position. The processing position provides convenient and efficient access by a central processing system, and the loading position preferably places each cassette closer to, and aligned with, a front panel of the processing system for convenient access by an operator. The actuator and support assembly preferably includes a frame assembly and a rotating plate pivotally mounted to the frame assembly, where the cassette support assembly is mounted to the rotating plate for pivoting relative to the frame assembly. An actuator assembly mounted to the frame assembly flits the cassette support assembly between the loading and processing positions. A shaft assembly pivotally mounts the cassette support assembly to the rotating plate. An adjustable linkage assembly is mounted between the frame assembly and the shaft assembly, so that the cassette support assembly is rotated or swiveled by an adjustable amount between the loading and processing positions.