Forward Citations = 104

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5 inventors (with patents filed for the assignee):

Nicholas Guarino (4 out of 7 patents)

Billy W Ward (2 out of 43 patents)

David C Shaver (1 out of 9 patents)

4. Gabriel Onorio (1 out of 1 patent)

5. John A Doherty (1 out of 1 patent)

5 patents: Sort by Forward Citations

1. 4777372 - Right angle driving (1988-10-11),

2. 4711438 - Mask holding (1987-12-08),

3. 4699555 - Module positioning apparatus (1987-10-13),

4. 4673101 - Evacuable chamber enclosing (1987-06-16),

5. 4639301 - Focused ion beam processing (1987-01-27),

Micrion Limited Partnership is a leading provider of advanced manufacturing solutions for the semiconductor industry. Specializing in electron beam lithography tools and services, Micrion offers high precision technology for nanoscale patterning and imaging applications. With a strong track record of innovation and customer satisfaction, Micrion is trusted by top chip manufacturers worldwide.

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USPTO Data Jan 1 1976 - Dec 9 2025

5 Patents

#31 in Beverly, MA

#2,814 in Massachusetts

#50,165 in US

Beverly, MA, United States of America

Micrion Limited Partnership