The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 1988
Filed:
May. 08, 1986
Applicant:
Inventor:
Nicholas Guarino, Arlington, MA (US);
Assignee:
Micrion Limited Partnership, Beverly, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
2504421 ; 269 50 ; 269 51 ;
Abstract
A platform for positioning inside an evacuated chamber is slidable in a y--y direction along a movable support member that is movable along an x--x direction perpendicular to the y--y direction. The movable support member is formed with end bearings that ride along a y-drive shaft that carries a first helical gear for meshing with a second orthogonal helical gear that rotates a feed screw accommodated by a threaded opening in the platform. An electric motor is coupled to the y-drive shaft through the wall of the evacuated housing with a vacuum sealing assembly.