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Rockville, MD, United States of America

Fusion Systems Corporation

USPTO Granted Patents = 68

Forward Citations = 2,252

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63 inventors (with patents filed for the assignee):

Michael G Ury (27 out of 49 patents)

Charles H Wood (21 out of 44 patents)

Mohammad Kamarehi (7 out of 17 patents)

4. James E Simpson (6 out of 17 patents)

5. James T Dolan (4 out of 21 patents)

6. Robert D Wooten (4 out of 6 patents)

7. Donald C Lynch (4 out of 7 patents)

8. Delroy O Walker (4 out of 4 patents)

9. John C Matthews (4 out of 5 patents)

10. Robert Douglas Mohondro (3 out of 10 patents)

11. Brian P Turner (3 out of 26 patents)

12. Mohammed Kamarehi (3 out of 3 patents)

13. John C Egermeier (3 out of 3 patents)

14. Robert J Sweetman (3 out of 6 patents)

15. James D Hill (3 out of 8 patents)

Core Competencies:

Photoresist

Microwave Plasma

Electrodeless Lamp

Photopolymerization

Magnetron

UV Curing

Radiation Source

Temperature Control

Optical System

Dielectric

Power Supply

Fluid Treatment

68 patents: Sort by Forward Citations

1. 6214524 - Controlled amine poisoning for reduced shrinkage of features formed in photoresist (2001-04-10),

2. 6117622 - Controlled shrinkage of photoresist (2000-09-12),

3. 6057084 - Controlled amine poisoning for reduced shrinkage of features formed in (2000-05-02),

4. 5980638 - Double window exhaust arrangement for wafer plasma processor (1999-11-09),

5. 5961851 - Microwave plasma discharge device (1999-10-05),

6. 5838114 - Plural ferro-resonant power supplies for powering a magnetron where the (1998-11-17),

7. 5791782 - Contact temperature probe with unrestrained orientation (1998-08-11),

8. 5767626 - Electrodeless lamp starting/operation with sources at different (1998-06-16),

9. 5674039 - System for transferring articles between controlled environments (1997-10-07),

10. 5606220 - Visible lamp including selenium or sulfur (1997-02-25),

11. 5571439 - Magnetron variable power supply with moding prevention (1996-11-05),

12. 5504391 - Excimer lamp with high pressure fill (1996-04-02),

13. 5498308 - Plasma asher with microwave trap (1996-03-12),

14. 5471109 - Method and apparatus for preventing reverse flow in air or gas cooled (1995-11-28),

15. 5446073 - Photopolymerization process employing a charge transfer complex without (1995-08-29),

Company Overview

Fusion Systems Corporation, based in Rockville, MD, specializes in the development and manufacturing of advanced electrodeless lamp technologies. The company focuses on innovative solutions in areas such as photoresist applications, microwave plasma generation, and UV curing processes. Their expertise extends to photopolymerization and temperature control systems, positioning them as a key player in providing efficient radiation sources for various industrial applications. Fusion Systems is dedicated to enhancing performance and reliability in the field of lighting and materials processing.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 20 2026

68 Patents

#8 in Rockville, MD

#48 in Maryland

#5,377 in US

#10,894 in the World

Rockville, MD, United States of America

Fusion Systems Corporation

Forward Citations = 2,252

63 inventors:

Michael G Ury (27 out of 49 patents)

Charles H Wood (21 out of 44 patents)

Mohammad Kamarehi (7 out of 17 patents)

4. James E Simpson (6 out of 17 patents)

5. James T Dolan (4 out of 21 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Fusion Systems Corporation. Retrieved from https://idiyas.com/company/fusion-systems

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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