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% Expired Patents = 13.3

EPO Patents = 1

Trademarks = 6

Forward Citations = 300

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3 inventors (with patents filed for the assignee):

Scott A Chalmers (15 out of 17 patents)

Randall S Geels (8 out of 8 patents)

Matthew F Ross (2 out of 22 patents)

15 patents: Sort by Forward Citations

1. 11099068 - Optical instrumentation including a spatially variable filter (2021-08-24),

2. 10948284 - Optical profilometer with color outputs (2021-03-16),

3. 10724900 - Determining focus condition in spectral reflectance system (2020-07-28),

4. 10620420 - Optical system for use with microscope (2020-04-14),

5. 10571615 - High-lifetime broadband light source for low-power applications (2020-02-25),

6. 10247605 - Automatic real-time wavelength calibration of fiber-optic-based spectrometers (2019-04-02),

7. 10240981 - Optical spectrometer configuration including spatially variable filter (SVF) (2019-03-26),

8. 9019484 - Combining normal-incidence reflectance and transmittance with non-normal-incidence reflectance for model-free characterization of single-layer films (2015-04-28),

9. 8908177 - Correction of second-order diffraction effects in fiber-optic-based spectrometers (2014-12-09),

10. 7502119 - Thin-film metrology using spectral reflectance with an intermediate in-line reference (2009-03-10),

11. 7151609 - Determining wafer orientation in spectral imaging (2006-12-19),

12. 7095511 - Method and apparatus for high-speed thickness mapping of patterned thin films (2006-08-22),

13. 6204922 - Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sample (2001-03-20),

14. 6184985 - Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sources (2001-02-06),

15. 6172756 - Rapid and accurate end point detection in a noisy environment (2001-01-09),

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