The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2001
Filed:
Dec. 11, 1998
Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sample
Applicant:
Inventor:
Scott A. Chalmers, La Jolla, CA (US);
Assignee:
Filmetrics, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 1/106 ;
U.S. Cl.
CPC ...
G01B 1/106 ;
Abstract
Methods and apparatus for measuring the thickness of at least one individual film added to, removed from, or within a sample, characterized by the use of a shift in a selected peak of thickness spectral data to estimate the thickness of the individual film.