Forward Citations = 228

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6 inventors (with patents filed for the assignee):

David J Elliott (4 out of 18 patents)

David R Shafer (2 out of 50 patents)

Jonathan C Camp (1 out of 2 patents)

4. George D Whitten (1 out of 2 patents)

5. Richard F Hollman (1 out of 5 patents)

6. Warren C Harlow (1 out of 1 patent)

4 patents: Sort by Forward Citations

1. 6032997 - Vacuum chuck (2000-03-07),

2. 5771260 - Enclosure system for laser optical systems and devices (1998-06-23),

3. 5559338 - Deep ultraviolet optical imaging system for microlithography and/or (1996-09-24),

4. 5488229 - Deep ultraviolet microlithography system (1996-01-30),

Excimer Laser Systems is a leading provider of advanced laser technology for medical and industrial applications. With a focus on precision and efficiency, our cutting-edge laser systems deliver unmatched performance and reliability. Our commitment to innovation and customer satisfaction sets us apart in the industry, making us a trusted partner for companies worldwide.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Jan 6 2026

4 Patents

#5 in Wayland, MA

#3,234 in Massachusetts

#59,078 in US

Wayland, MA, United States of America

Excimer Laser Systems