The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2000
Filed:
Apr. 16, 1998
Applicant:
Inventors:
David J Elliott, Wayland, MA (US);
George D Whitten, Stewart, FL (US);
Assignee:
Excimer Laser Systems, Wayland, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J / ; B25J / ;
U.S. Cl.
CPC ...
294 641 ; 294902 ; 294907 ; 414941 ; 901 40 ; 901 47 ; 269 21 ;
Abstract
A vacuum chuck having a body portion made of moldable glass or another suitable dielectric material including a top surface and bottom surface, a series of flat lands on the top surface of the body portion for supporting a wafer, and a series of orifices and vacuum lines for drawing a vacuum to secure the wafer in place on the lands of the body portion. A method of manufacturing such a vacuum chuck. A method of aligning a wafer on such a vacuum chuck.