For the Inventor, By the Inventor

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Tempe, AZ, United States of America

Epsilon Limited Partnership

USPTO Granted Patents = 3

Forward Citations = 114

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7 inventors (with patents filed for the assignee):

Wayne L Johnson (3 out of 69 patents)

McDonald Robinson (3 out of 18 patents)

Wiebe B deBoer (2 out of 15 patents)

4. Ronald D Behee (2 out of 2 patents)

5. Aage Olsen (1 out of 3 patents)

6. Mark R Hawkins (1 out of 39 patents)

7. Dennis L Goodwin (1 out of 22 patents)

3 patents: Sort by Forward Citations

1. 4874464 - Process for epitaxial deposition of silicon (1989-10-17),

2. 4789771 - Method and apparatus for substrate heating in an axially symmetric (1988-12-06),

3. 4654509 - Method and apparatus for substrate heating in an axially symmetric (1987-03-31),

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USPTO Data Jan 1 1976 - Sep 29 2026

3 Patents

#132 in Tempe, AZ

#1,003 in Arizona

#73,766 in US

Tempe, AZ, United States of America

Epsilon Limited Partnership

Forward Citations = 114

7 inventors:

Wayne L Johnson (3 out of 69 patents)

McDonald Robinson (3 out of 18 patents)

Wiebe B deBoer (2 out of 15 patents)

4. Ronald D Behee (2 out of 2 patents)

5. Aage Olsen (1 out of 3 patents)

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