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Paradise Valley, AZ, United States of America

McDonald Robinson

USPTO Granted Patents = 18

Average Co-Inventor Count = 3.1

ph-index = 15

Forward Citations = 1,754(Granted Patents)

Company Filing History:

Epsilon Technology Corporation

Advanced Semiconductor Materials America, Inc.

Epsilon Limited Partnership

5. 1 out of 832,680

Other

patents

Years Active: 1987-1998

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18 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 5819684 - Gas injection system for reaction chambers in CVD systems (1998-10-13),

2. 5525157 - Gas injectors for reaction chambers in CVD systems (1996-06-11),

3. 5458918 - Gas injectors for reaction chambers in CVD systems (1995-10-17),

4. 5435682 - Chemical vapor desposition system (1995-07-25),

5. 5411590 - Gas injectors for reaction chambers in CVD systems (1995-05-02),

6. 5324155 - Wafer handling system with bernoulli pick-up (1994-06-28),

7. 5221556 - Gas injectors for reaction chambers in CVD systems (1993-06-22),

8. 5156521 - Method for loading a substrate into a GVD apparatus (1992-10-20),

9. 5092728 - Substrate loading apparatus for a CVD process (1992-03-03),

10. 5080549 - Wafer handling system with Bernoulli pick-up (1992-01-14),

11. 5020475 - Substrate handling and transporting apparatus (1991-06-04),

12. 4975561 - Heating system for substrates (1990-12-04),

13. 4874464 - Process for epitaxial deposition of silicon (1989-10-17),

14. 4836138 - Heating system for reaction chamber of chemical vapor deposition (1989-06-06),

15. 4828224 - Chemical vapor deposition system (1989-05-09),

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