This inventor holds 18 USPTO granted patents. Top assignees: Epsilon Technology Corporation, Advanced Semiconductor Materials America, Inc., Epsilon Limited Partnership. Active years: 1987-1998.
Company Filing History:
8 out of 19 
5 out of 20 
3 out of 3 Years Active: 1987-1998
Title: McDonald Robinson: Innovator in CVD Systems
Introduction
McDonald Robinson is a notable inventor based in Paradise Valley, AZ (US). He holds a total of 18 patents, showcasing his significant contributions to the field of chemical vapor deposition (CVD) systems. His work primarily focuses on improving the efficiency and uniformity of gas injection systems used in semiconductor manufacturing.
Latest Patents
One of Robinson's latest patents is a gas injection system for reaction chambers in CVD systems. This invention relates to enhanced injectors designed for use in epitaxial deposition systems that process a single wafer at a time. The improved injectors aim to provide a predetermined desired shaped velocity profile for the injected reactant gases, ensuring a more uniform deposition on the wafer. In the first embodiment, the reactant gas is introduced into a horizontal gas distribution manifold cavity, which distributes the gas horizontally in both directions. The gas then passes through a manifold wall with a pattern of sized and spaced apertures, shaping the resultant velocity profile. The design allows for maximum flow at the center, where the largest apertures are located, and minimum flow at the sides, where the smallest apertures exist. This results in a desired velocity profile as the gas exits the delivery chamber and is injected into the reaction chamber.
Career Highlights
Throughout his career, McDonald Robinson has worked with several prominent companies, including Epsilon Technology Corporation and Advanced Semiconductor Materials America, Inc. His experience in these organizations has contributed to his expertise in the field of semiconductor technology and CVD systems.
Collaborations
Some of his notable coworkers include Mark R Hawkins and Dennis L Goodwin. Their collaboration has likely fostered innovation and advancements in their respective projects.
Conclusion
McDonald Robinson's contributions to the field of CVD systems through his innovative patents and collaborations highlight his role as a significant inventor. His work continues to influence the semiconductor industry, ensuring advancements in technology and manufacturing processes.