The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Mar. 17, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Santosh Bhattacharyya, San Jose, CA (US);
Pavan Kumar, San Jose, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
Thirupurasundari Jayaraman, Chennai, IN;
Raghav Babulnath, San Jose, CA (US);
Srikanth Kandukuri, Hyderabad, IN;
Gangadharan Sivaraman, Chennai, IN;
Karthikeyan Subramanian, Chennai, IN;
Raghavan Konuru, Andhra Pradesh, IN;
Rahul Lakhawat, Chennai, IN;
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for determining a position of output generated by an inspection subsystem in design data space are provided. In general, some embodiments described herein are configured for substantially accurately aligning inspection subsystem output generated for a specimen to a design for the specimen despite deformation of the design in the inspection subsystem output. In addition, some embodiments are configured for generating and/or using alignment targets that can be shared across multiple specimens of the same layer and design rule for alignment of inspection subsystem output generated for a specimen to a design for the specimen.