The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Feb. 26, 2014
Asml Netherlands B.v., Veldhoven, NL;
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Erik Roelof Loopstra, Eindhoven, NL;
Olav Waldemar Vladimir Frijns, Rosmalen, NL;
Stig Bieling, Aalen, DE;
Antonius Theodorus Wilhelmus Kempen, Rosmalen, NL;
Ivo Vanderhallen, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Richard Henricus Adrianus Van Lieshout, Batenburg, NL;
Theodorus Petrus Maria Cadee, Asten, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Marcus Petrus Scheepers, Dongen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a second location at said distance from the radiation collector, wherein the first location and the second location are separated from one another.