The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Feb. 05, 2010
Applicants:
Chris Lee, Fremont, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
Tao Luo, Fremont, CA (US);
Kenong Wu, Davis, CA (US);
Tommaso Torelli, Berkeley, CA (US);
Michael J. Van Riet, Sunnyvale, CA (US);
Brian Duffy, San Jose, CA (US);
Inventors:
Chris Lee, Fremont, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
Tao Luo, Fremont, CA (US);
Kenong Wu, Davis, CA (US);
Tommaso Torelli, Berkeley, CA (US);
Michael J. Van Riet, Sunnyvale, CA (US);
Brian Duffy, San Jose, CA (US);
Assignee:
KLA-Tencor Corp., Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); G01N 21/9501 (2013.01); H01L 22/12 (2013.01); H01L 2924/0002 (2013.01);
Abstract
Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are provided.