The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Nov. 18, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Allen Park, San Jose, CA (US);
Ellis Chang, Saratoga, CA (US);
Michael Adel, Ya'akov, IL;
Kris Bhaskar, San Jose, CA (US);
Ady Levy, Sunnyvale, CA (US);
Amir Widmann, Sunnyvale, CA (US);
Mark Wagner, Rehovot, IL;
Songnian Rong, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Universal target based inspection drive metrology includes designing a plurality of universal metrology targets measurable with an inspection tool and measurable with a metrology tool, identifying a plurality of inspectable features within at least one die of a wafer using design data, disposing the plurality of universal targets within the at least one die of the wafer, each universal target being disposed at least proximate to one of the identified inspectable features, inspecting a region containing one or more of the universal targets with an inspection tool, identifying one or more anomalistic universal targets in the inspected region with an inspection tool and, responsive to the identification of one or more anomalistic universal targets in the inspected region, performing one or more metrology processes on the one or more anomalistic universal metrology targets with the metrology tool.