The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2016

Filed:

Mar. 14, 2013
Applicants:

Chytra Pawashe, Beaverton, OR (US);

Kevin Lin, Beaverton, OR (US);

Anurag Chaudhry, California, CA (US);

Raseong Kim, Hillsboro, OR (US);

Seiyon Kim, Portland, OR (US);

Kelin Kuhn, Aloha, OR (US);

Sasikanth Manipatruni, Hillsboro, OR (US);

Rafael Rios, Portland, OR (US);

Ian A. Young, Portland, OR (US);

Inventors:

Chytra Pawashe, Beaverton, OR (US);

Kevin Lin, Beaverton, OR (US);

Anurag Chaudhry, California, CA (US);

Raseong Kim, Hillsboro, OR (US);

Seiyon Kim, Portland, OR (US);

Kelin Kuhn, Aloha, OR (US);

Sasikanth Manipatruni, Hillsboro, OR (US);

Rafael Rios, Portland, OR (US);

Ian A. Young, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 51/22 (2006.01); H01H 59/00 (2006.01); B82Y 10/00 (2011.01); H01H 1/00 (2006.01); H01H 9/02 (2006.01);
U.S. Cl.
CPC ...
H01H 59/0009 (2013.01); B82Y 10/00 (2013.01); H01H 1/0094 (2013.01); H01H 9/0271 (2013.01);
Abstract

Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.


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