The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Oct. 09, 2014
United Microelectronics Corporation, Hsinchu, TW;
Yi-Hui Lee, Taipei, TW;
Tsung-Hung Chang, Linnei Township, TW;
Ching-Wen Hung, Tainan, TW;
Jia-Rong Wu, Kaohsiung, TW;
Ching-Ling Lin, Kaohsiung, TW;
Chih-Sen Huang, Tainan, TW;
Yi-Wei Chen, Taichung, TW;
Chia-Chang Hsu, Kaohsiung, TW;
Shu-Min Huang, Tainan, TW;
Hsin-Fu Huang, Tainan, TW;
UNITED MICROELECTRONICS CORPORATION, Hsinchu, TW;
Abstract
The method for cleaning a contact hole and forming a contact plug therein is provided. The method includes steps of: providing a silicon substrate; forming a contact hole in the silicon substrate; performing a pre-cleaning process to clean the contact hole; and forming a contact plug in the contact hole. The pre-cleaning process includes steps of: performing an oxide dry etching process; performing a first thermal annealing process with a temperature which is equal to or greater than 300° C.; performing a degassing process with a temperature which is equal to or greater than 300° C.; and performing an Ar-plasma etching process.