The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Oct. 31, 2014
Rajeev Bajaj, Fremont, CA (US);
Ping Huang, Eden Prairie, MN (US);
Robert Kerprich, Portland, OR (US);
William C. Allison, Beaverton, OR (US);
Richard Frentzel, Murrieta, CA (US);
Diane Scott, Portland, OR (US);
Rajeev Bajaj, Fremont, CA (US);
Ping Huang, Eden Prairie, MN (US);
Robert Kerprich, Portland, OR (US);
William C. Allison, Beaverton, OR (US);
Richard Frentzel, Murrieta, CA (US);
Diane Scott, Portland, OR (US);
NexPlanar Corporation, Hillsboro, OR (US);
Abstract
Polishing pads with homogeneous bodies having discrete protrusions thereon are described. In an example, a polishing pad for polishing a substrate includes a homogeneous body having a polishing side and a back side. The homogeneous body is composed of a material having a first hardness. A plurality of discrete protrusions is disposed on and covalently bonded with the polishing side of the homogeneous body. The plurality of discrete protrusions is composed of a material having a second hardness different from the first hardness. Methods of fabricating polishing pads with homogeneous bodies having discrete protrusions thereon are also described.