The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2016
Filed:
Dec. 10, 2010
Mingqi LI, Shrewsbury, MA (US);
Emad Aqad, Northborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Joseph Mattia, Framingham, MA (US);
Cheng-bai Xu, Southborough, MA (US);
George G. Barclay, Jefferson, MA (US);
Mingqi Li, Shrewsbury, MA (US);
Emad Aqad, Northborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Joseph Mattia, Framingham, MA (US);
Cheng-Bai Xu, Southborough, MA (US);
George G. Barclay, Jefferson, MA (US);
Rohm and Haas Electronic Materials, LLC, Marlborough, MA (US);
Abstract
New methods are provided for synthesis of photoacid generator compounds ('PAGs'), new photoacid generator compounds and photoresist compositions that comprise such PAG compounds. In a particular aspect, sulfonium-containing (S+) photoacid generators and methods of synthesis of sulfonium photoacid generators are provided.