The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Nov. 06, 2009
Jun Hirose, Nirasaki, JP;
Kazuyuki Tezuka, Nirasaki, JP;
Yohei Uchida, Nirasaki, JP;
Mutsunori Koyomogi, Osaka, JP;
Takahiro Matsuda, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Jun Hirose, Nirasaki, JP;
Kazuyuki Tezuka, Nirasaki, JP;
Yohei Uchida, Nirasaki, JP;
Mutsunori Koyomogi, Osaka, JP;
Takahiro Matsuda, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
FUJIKIN INCORPORATED, Osaka-shi, JP;
Abstract
To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.