The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Jul. 22, 2011
Amnon Manassen, Haifa, IL;
Daniel Kandel, Aseret, IL;
Moshe Baruch, Misgav, IL;
Joel L. Seligson, Misgav, IL;
Alexander Svizher, Haifa, IL;
Guy Cohen, Misgav, IL;
Efraim Rotem, Hod Hasharon, IL;
Ohad Bachar, Timrat, IL;
Daria Negri, Nesher, IL;
Noam Sapiens, Bat Yam, IL;
Amnon Manassen, Haifa, IL;
Daniel Kandel, Aseret, IL;
Moshe Baruch, Misgav, IL;
Joel L. Seligson, Misgav, IL;
Alexander Svizher, Haifa, IL;
Guy Cohen, Misgav, IL;
Efraim Rotem, Hod Hasharon, IL;
Ohad Bachar, Timrat, IL;
Daria Negri, Nesher, IL;
Noam Sapiens, Bat Yam, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present invention includes an illumination source, at least one illumination symmetrization module (ISM) configured to symmetrize at least a portion of light emanating from the illumination source, a first beam splitter configured to direct a first portion of light processed by the ISM along an object path to a surface of one or more specimens and a second portion of light processed by the ISM along a reference path, and a detector disposed along a primary optical axis, wherein the detector is configured to collect a portion of light reflected from the surface of the one or more specimens.