The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Jul. 02, 2010
Tatsuaki Ishijima, Abiko, JP;
Osamu Nasu, Hitachinaka, JP;
Muneyuki Fukuda, Kokubunji, JP;
Takeyoshi Ohashi, Tachikawa, JP;
Takuji Miyamoto, Mito, JP;
Kei Sakai, Hitachinaka, JP;
Tatsuaki Ishijima, Abiko, JP;
Osamu Nasu, Hitachinaka, JP;
Muneyuki Fukuda, Kokubunji, JP;
Takeyoshi Ohashi, Tachikawa, JP;
Hiromasa Yamanashi, Sagamihara, JP;
Takuji Miyamoto, Mito, JP;
Kei Sakai, Hitachinaka, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
The present invention has an object to perform specimen charge measurement or focusing at a high speed and with high precision also for a specimen in which fixed charge and induced charge may be mixedly present. As one mode to achieve the object, there are proposed a specimen potential measuring method and a device to implement the method characterized in that when specimen potential information obtained by a first specimen potential measuring device disposed outside a specimen chamber or specimen potential information beforehand obtained is equal to or more than a predetermined threshold value or is more than the threshold value, measurement of specimen potential is selectively conducted by use of a second specimen potential measuring device in the specimen chamber.