The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

Jul. 22, 2014
Applicant:

Maxpower Semiconductor, Inc., San Jose, CA (US);

Inventors:

Jun Zeng, Torrance, CA (US);

Mohamed N. Darwish, Campbell, CA (US);

Kui Pu, Chengdu, CN;

Shih-Tzung Su, Shulin, TW;

Assignee:

MaxPower Semiconductor, Inc., San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 29/732 (2006.01); H01L 29/739 (2006.01); H01L 29/40 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7813 (2013.01); H01L 29/0634 (2013.01); H01L 29/1095 (2013.01); H01L 29/402 (2013.01); H01L 29/4236 (2013.01); H01L 29/7397 (2013.01); H01L 29/7811 (2013.01);
Abstract

A power MOSFET cell includes an N+ silicon substrate having a drain electrode. A low dopant concentration N-type drift layer is grown over the substrate. Alternating N and P-type columns are formed over the drift layer with a higher dopant concentration. An N-type layer, having a higher dopant concentration than the drift region, is then formed and etched to have sidewalls. A P-well is formed in the N-type layer, and an N+ source region is formed in the P-well. A gate is formed over the P-well's lateral channel and next to the sidewalls as a vertical field plate. A source electrode contacts the P-well and source region. A positive gate voltage inverts the lateral channel and increases the conduction along the sidewalls. Current between the source and drain flows laterally and then vertically through the various N layers. On resistance is reduced and the breakdown voltage is increased.


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