The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Aug. 01, 2011
Lisheng Gao, Morgan Hill, CA (US);
Kenong Wu, Davis, CA (US);
Allen Park, San Jose, CA (US);
Ellis Chang, Saratoga, CA (US);
Khurram Zafar, San Jose, CA (US);
Junqing Huang, Fremont, CA (US);
Ping Gu, Milpitas, CA (US);
Christopher Maher, Campbell, CA (US);
Grace H. Chen, Los Gato, CA (US);
Songnian Rong, San Jose, CA (US);
Liu-ming Wu, Fremont, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
Kenong Wu, Davis, CA (US);
Allen Park, San Jose, CA (US);
Ellis Chang, Saratoga, CA (US);
Khurram Zafar, San Jose, CA (US);
Junqing Huang, Fremont, CA (US);
Ping Gu, Milpitas, CA (US);
Christopher Maher, Campbell, CA (US);
Grace H. Chen, Los Gato, CA (US);
Songnian Rong, San Jose, CA (US);
Liu-Ming Wu, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present invention includes searching imagery data in order to identify one or more patterned regions on a semiconductor wafer, generating one or more virtual Fourier filter (VFF) working areas, acquiring an initial set of imagery data from the VFF working areas, defining VFF training blocks within the identified patterned regions of the VFF working areas utilizing the initial set of imagery data, wherein each VFF training block is defined to encompass a portion of the identified patterned region displaying a selected repeating pattern, calculating an initial spectrum for each VFF training block utilizing the initial set of imagery data from the VFF training blocks, and generating a VFF for each training block by identifying frequencies of the initial spectrum having maxima in the frequency domain, wherein the VFF is configured to null the magnitude of the initial spectrum at the frequencies identified to display spectral maxima.