The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Jan. 25, 2011
Applicants:
Cong Liu, Shrewsbury, MA (US);
Chunyi Wu, Shrewsbury, MA (US);
Gerhard Pohlers, Needham, MA (US);
Gregory P. Prokopowicz, Worcester, MA (US);
Cheng-bai Xu, Southboro, MA (US);
Inventors:
Cong Liu, Shrewsbury, MA (US);
Chunyi Wu, Shrewsbury, MA (US);
Gerhard Pohlers, Needham, MA (US);
Gregory P. Prokopowicz, Worcester, MA (US);
Cheng-Bai Xu, Southboro, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/26 (2006.01); C07C 261/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
New nitrogen-containing compounds are provided that comprise multiple hydroxyl moieties and photoresist compositions that comprise such nitrogen-containing compounds. Preferred nitrogen-containing compounds comprise 1) multiple hydroxyl substituents (i.e. 2 or more) and 2) one or more photoacid-labile groups.