The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
May. 05, 2009
Yi-li Hsiao, Hsinchu, TW;
Chen-hua Yu, Hsin-Chu, TW;
Jean Wang, Hsin-Chu, TW;
Ming-che Ho, Tainan, TW;
Chien-ling Hwang, Hsin-Chu, TW;
Jui-pin Hung, Hsinchu, TW;
Yi-Li Hsiao, Hsinchu, TW;
Chen-Hua Yu, Hsin-Chu, TW;
Jean Wang, Hsin-Chu, TW;
Ming-che Ho, Tainan, TW;
Chien-Ling Hwang, Hsin-Chu, TW;
Jui-Pin Hung, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A semiconductor manufacturing system, an interface system, a carrier, and a method for providing an ambient controlled environment is disclosed. The semiconductor manufacturing system comprises a plurality of process chambers; at least one interface system, wherein the interface system includes a first ambient control element; at least one carrier, wherein the carrier comprises a second ambient control element; and a control module coupled to the plurality of process chambers, the at least one interface system, and the at least one carrier.