The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2014
Filed:
Mar. 26, 2012
Yuichiro Morozumi, Nirasaki, JP;
Takuya Sugawara, Nirasaki, JP;
Koji Akiyama, Nirasaki, JP;
Shingo Hishiya, Nirasaki, JP;
Toshiyuki Hirota, Tokyo, JP;
Takakazu Kiyomura, Tokyo, JP;
Yuichiro Morozumi, Nirasaki, JP;
Takuya Sugawara, Nirasaki, JP;
Koji Akiyama, Nirasaki, JP;
Shingo Hishiya, Nirasaki, JP;
Toshiyuki Hirota, Tokyo, JP;
Takakazu Kiyomura, Tokyo, JP;
Elpida Memory Inc., Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of forming a dielectric film including a zirconium oxide film includes: forming a zirconium oxide film on a substrate to be processed by supplying a zirconium material and an oxidant, the zirconium material including a Zr compound which includes a cyclopentadienyl ring in a structure, and forming a titanium oxide film on the zirconium oxide film by supplying a titanium material and an oxidant, the titanium material including a Ti compound which includes a cyclopentadienyl ring in a structure.