The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Mar. 24, 2009
Guido Limbach, Aalen, DE;
Franz Sorg, Aalen, DE;
Armin Schoeppach, Aalen, DE;
Ulrich Weber, Ulm, DE;
Ulrich Loering, Oberkochen, DE;
Dirk Hellweg, Aalen, DE;
Peter Meyer, Beverungen, DE;
Stefan Xalter, Oberkochen, DE;
Jens Kugler, Aalen, DE;
Bernhard Gellrich, Aalen, DE;
Stefan Hembacher, Bobingen, DE;
Bernhard Geuppert, Aalen, DE;
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Guido Limbach, Aalen, DE;
Franz Sorg, Aalen, DE;
Armin Schoeppach, Aalen, DE;
Ulrich Weber, Ulm, DE;
Ulrich Loering, Oberkochen, DE;
Dirk Hellweg, Aalen, DE;
Peter Meyer, Beverungen, DE;
Stefan Xalter, Oberkochen, DE;
Jens Kugler, Aalen, DE;
Bernhard Gellrich, Aalen, DE;
Stefan Hembacher, Bobingen, DE;
Bernhard Geuppert, Aalen, DE;
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The disclosure relates to an optical system, such as a projection exposure apparatus for semiconductor lithography, including a manipulable correction arrangement for reducing image aberrations. In some embodiments, the system includes at least one manipulator configured to reduce image aberrations. The manipulator can include at least one optical element which can be manipulated by at least one actuator. The manipulator can be formed in changeable fashion together with an actuator.