The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Feb. 02, 2010
Ulrich Loering, Oberkochen, DE;
Gerd Reisinger, Oberkochen, DE;
Franz-josef Stickel, Aalen, DE;
Sonja Schneider, Oberkochen, DE;
Johann Trenkler, Schwaebisch Gmuend, DE;
Stefan Kraus, Aalen, DE;
Gordon Doering, Hamburg, DE;
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Ulrich Loering, Oberkochen, DE;
Gerd Reisinger, Oberkochen, DE;
Franz-Josef Stickel, Aalen, DE;
Sonja Schneider, Oberkochen, DE;
Johann Trenkler, Schwaebisch Gmuend, DE;
Stefan Kraus, Aalen, DE;
Gordon Doering, Hamburg, DE;
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A projection objective is disclosed. The projection objective can include a plurality of optical elements arranged to image a pattern from an object field in an object surface of the projection objective to an image field in an image surface of the projection objective with electromagnetic operating radiation from a wavelength band around an operating wavelength λ. The plurality of optical elements can include an optical correction plate that includes a body comprising a material transparent to the operating radiation, the body having a first optical surface, a second optical surface, a plate normal substantially perpendicular to the first and second optical surfaces, and a thickness profile defined as a distance between the first and second optical surfaces measured parallel to the plate normal. The first optical surface can have a non-rotationally symmetric aspheric first surface profile with a first peak-to-valley value PV>λ. The second optical surface can have a non-rotationally symmetric aspheric second surface profile with a second peak-to-valley value PV>λ. A thickness of the optical correction plate can vary by less than 0.1*(PV+PV)/2 across the optical correction plate.